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Title :アルゴンプラズマ内NHiラジカル生成機構とNHiラジカル連鎖反応機構の解明
Authors :神原, 信志
Issue Date :Mar-2009
Abstract :平成19年度-平成20年度科学研究費補助金 (基盤研究(C)　一般　環境技術・環境材料　課題番号19510084) 研究成果報告書
Type Local :研究報告書
URI :http://hdl.handle.net/20.500.12099/35238
Appears in Collections:Grants-in-Aid for Scientific Research - Engineering